Process Support Tools, Parts and Services

CMP Pad Conditioners
Post CMP Cleaning PVA Brushes
CMP Second Source Spare Parts
Gold Components for Epi and other processes
Quartz Components for Epi, RTP, PVD and other processes
Back Grind Wheels
CMP Retaining Rings
Custom Panels (UL508)
Electrical Components
RF Based End Point Detection Systems

Wet Process Support

Megasonics (Cleaning Systems, Controllers, Submersible Arrays)
Di Water Heating Systems
Chemical Blending Systems
In-Line Chemical Heaters
In-Line Solvent Heaters
Tank Heaters
Process Baths: Megasonic Tanks, Constant Temperature Baths,
QDR’s, Nitride Etch Baths, Recirculating Baths, OEM Tanks
(In Poly, PVDF, PFA, Quartz or Stainless Steel)

Wafer Carriers

FOUPS’s
FOSB’s
SMIF Pods
Process Cassettes
PFA Cassettes
Metal Cassettes
Quartz Cassettes
Storage Boxes
Shipping Cassettes
Single Wafer Carriers
Bags for Wafer Carriers
Metalized Bags
Polypropylene Bags